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Articles

Tom Eby, Usha Gundusharma, Michael Lo, Khoren Sahagian, Curtis Marcott, Kevin Kjoller

It is possible to obtain both infrared spectra and thermal analysis data of individual layers in a cross-sectioned multilayer film. Since both techniques are AFM-based, the topographical features can be readily linked to the spectroscopic and thermal data at a much higher spatial resolution than previously achievable.

Article  |  Issue 24/3 (2012)